dc.contributor.author | Knotter, D. M. | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-14T13:10:31Z | |
dc.date.available | 2021-10-14T13:10:31Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4486 | |
dc.source | IIOimport | |
dc.title | Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 736 | |
dc.source.endpage | 740 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 2 | |
dc.source.volume | 147 | |
imec.availability | Published - open access | |