Show simple item record

dc.contributor.authorPacco, Antoine
dc.contributor.authorNakano, Teppei
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorLai, Ju-Geng
dc.contributor.authorKawarazaki, Hikaru
dc.contributor.authorAltamirano Sanchez, Efrain
dc.date.accessioned2025-07-31T09:41:46Z
dc.date.available2025-01-16T18:30:51Z
dc.date.available2025-07-31T09:41:46Z
dc.date.issued2025
dc.identifier.issn0167-9317
dc.identifier.otherWOS:001392636300001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45085.2
dc.sourceWOS
dc.titleEtching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolution
dc.typeJournal article
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorLai, Ju-Geng
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecLoyo Prado, Jana::0009-0000-8595-0918
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.identifier.doi10.1016/j.mee.2024.112304
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.beginpageArt. 112304
dc.source.endpageN/A
dc.source.journalMICROELECTRONIC ENGINEERING
dc.source.issue1 March
dc.source.volume297
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

VersionItemDateSummary

*Selected version