Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories

dc.contributor.author	Norga, Gerd
dc.contributor.author	Wouters, Dirk
dc.date.accessioned	2021-10-14T13:29:33Z
dc.date.available	2021-10-14T13:29:33Z
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4630
dc.source	IIOimport
dc.title	Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	205
dc.source.endpage	212
dc.source.journal	Integrated Ferroelectrics
dc.source.issue	1_4
dc.source.volume	31
imec.availability	Published - open access
imec.internalnotes	12th International Symposium on Integrated Ferroelectrics