The Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a Substrate
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Spaepen, F. | |
dc.date.accessioned | 2021-09-29T12:53:36Z | |
dc.date.available | 2021-09-29T12:53:36Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/464 | |
dc.source | IIOimport | |
dc.title | The Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a Substrate | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 1456 | |
dc.source.endpage | 1462 | |
dc.source.journal | J. Appl. Phys. | |
dc.source.volume | 75 | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |