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The Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a Substrate

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSpaepen, F.
dc.date.accessioned2021-09-29T12:53:36Z
dc.date.available2021-09-29T12:53:36Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/464
dc.sourceIIOimport
dc.titleThe Viscosity of Amorphous Pd-Si and Pd-Si/Pd-Si-Fe Multilayers Determined from Stress Relaxation in Thin Films on a Substrate
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage1456
dc.source.endpage1462
dc.source.journalJ. Appl. Phys.
dc.source.volume75
imec.availabilityPublished - imec


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