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Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

dc.contributor.authorProost, Joris
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMaex, Karen
dc.contributor.authorDelaey, L.
dc.date.accessioned2021-10-14T13:36:48Z
dc.date.available2021-10-14T13:36:48Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4678
dc.sourceIIOimport
dc.titleCompensation effect during water desorption from siloxane-based spin-on dielectric thin films
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage303
dc.source.endpage306
dc.source.journalJ. Vacuum Science and Technology B
dc.source.issue1
dc.source.volumeB18
imec.availabilityPublished - open access


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