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Internal stresses in aluminium interconnects

dc.contributor.authorSaerens, Annelies
dc.contributor.authorVan Houtte, P.
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-14T13:42:09Z
dc.date.available2021-10-14T13:42:09Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4714
dc.sourceIIOimport
dc.titleInternal stresses in aluminium interconnects
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage556
dc.source.endpage561
dc.source.journalMaterials Science Forum
dc.source.volume347-349
imec.availabilityPublished - imec
imec.internalnotesECRS 5: Proceedings of the Fifth European Conference on Residual Stresses


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