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New approach for the formation and separation of a thin porous silicon layer

dc.contributor.authorSolanki, Chetan Singh
dc.contributor.authorBilyalov, Renat
dc.contributor.authorBender, Hugo
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-14T13:48:58Z
dc.date.available2021-10-14T13:48:58Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4759
dc.sourceIIOimport
dc.titleNew approach for the formation and separation of a thin porous silicon layer
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.beginpage97
dc.source.endpage101
dc.source.journalPhysica Status Solidi A
dc.source.volumeA182
imec.availabilityPublished - imec


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