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Effects of low-thermal-budget treatments on the porous Si material properties

dc.contributor.authorStalmans, Lieven
dc.contributor.authorPoortmans, Jef
dc.contributor.authorBender, Hugo
dc.contributor.authorJin, S.
dc.contributor.authorConard, Thierry
dc.contributor.authorNijs, Johan
dc.contributor.authorDebarge, L.
dc.contributor.authorSlaoui, A.
dc.date.accessioned2021-10-14T13:50:12Z
dc.date.available2021-10-14T13:50:12Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4767
dc.sourceIIOimport
dc.titleEffects of low-thermal-budget treatments on the porous Si material properties
dc.typeJournal article
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage67
dc.source.endpage71
dc.source.journalJournal of Porous Materials
dc.source.issue1_3
dc.source.volume7
imec.availabilityPublished - imec


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