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Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples

dc.contributor.authorStephenson, Robert
dc.contributor.authorVerhulst, Anne
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:51:01Z
dc.date.available2021-10-14T13:51:01Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4772
dc.sourceIIOimport
dc.titleNonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
dc.typeJournal article
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage405
dc.source.endpage408
dc.source.journalJ. Vacuum Science and Technology B
dc.source.issue1
dc.source.volumeB18
imec.availabilityPublished - open access
imec.internalnotesPapers from the 5th International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles; 1999


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