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Cost effective realization of nanoscaled interdigitated electrodes

dc.contributor.authorVan Gerwen, Peter
dc.contributor.authorLaureyn, Wim
dc.contributor.authorCampitelli, Andrew
dc.contributor.authorJacobs, Philippe
dc.contributor.authorDetemple, P.
dc.contributor.authorBaert, Kris
dc.contributor.authorSansen, Willy
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-14T13:58:56Z
dc.date.available2021-10-14T13:58:56Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4821
dc.sourceIIOimport
dc.titleCost effective realization of nanoscaled interdigitated electrodes
dc.typeJournal article
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.beginpageN1
dc.source.endpageN5
dc.source.journalJ. Micromechanics and Microengineering
dc.source.issue3
dc.source.volume10
imec.availabilityPublished - imec


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