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Recovery of tungsten from the exhaust of a tungsten chemical vapor deposition tool

dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T14:00:35Z
dc.date.available2021-10-14T14:00:35Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4831
dc.sourceIIOimport
dc.titleRecovery of tungsten from the exhaust of a tungsten chemical vapor deposition tool
dc.typeJournal article
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage4665
dc.source.endpage4670
dc.source.journalJournal of the Electrochemical Society
dc.source.issue12
dc.source.volume147
imec.availabilityPublished - open access


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