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Influence of beam incidence angle on dry laser cleaning of surface parcticles

dc.contributor.authorVereecke, Guy
dc.contributor.authorRöhr, Erika
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T14:13:37Z
dc.date.available2021-10-14T14:13:37Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4909
dc.sourceIIOimport
dc.titleInfluence of beam incidence angle on dry laser cleaning of surface parcticles
dc.typeJournal article
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage67
dc.source.endpage73
dc.source.journalApplied Surface Science
dc.source.issue1_2
dc.source.volume157
imec.availabilityPublished - open access


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