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A high-throughput silicon microphysiometer

dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.contributor.authorSimaels, J.
dc.contributor.authorvan Driessche, W.
dc.date.accessioned2021-10-14T14:13:58Z
dc.date.available2021-10-14T14:13:58Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4911
dc.sourceIIOimport
dc.titleA high-throughput silicon microphysiometer
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage186
dc.source.endpage190
dc.source.journalSensors and Actuators A
dc.source.issue1
dc.source.volume82
imec.availabilityPublished - open access


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