Investigation of the formation process of MCs+-molecular ions during sputtering
dc.contributor.author | Vlekken, J. | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.contributor.author | Knuyt, G. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | De Schepper, Luc | |
dc.date.accessioned | 2021-10-14T14:16:21Z | |
dc.date.available | 2021-10-14T14:16:21Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4925 | |
dc.source | IIOimport | |
dc.title | Investigation of the formation process of MCs+-molecular ions during sputtering | |
dc.type | Journal article | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.beginpage | 650 | |
dc.source.endpage | 658 | |
dc.source.journal | Journal of the American Society for Mass Spectrometry | |
dc.source.issue | 7 | |
dc.source.volume | 11 | |
imec.availability | Published - imec |
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