Browsing Articles by author "Pagès, Xavier"
Now showing items 1-4 of 4
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Advanced PMOS device architecture for highly-doped ultra-shallow junctions
Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, C.J.J.; Ponomarev, Youri; Loo, Josine; Cubaynes, Florence; Henson, Kirklen; Verheijen, M.A.; Kaiser, M.; Pagès, Xavier; Stolk, Peter; Jurczak, Gosia (2004) -
Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
Pawlak, Bartek; Vandervorst, Wilfried; Smith, A.J.; Cowern, Nick E.B.; Colombeau, B.; Pagès, Xavier (2005) -
Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Lindsay, Richard; Henson, Kirklen; Vandervorst, Wilfried; Maex, Karen; Pawlak, Bartek; Duffy, Ray; Surdeanu, Radu; Stolk, Peter; Kittl, Jorge; Giangrandi, Simone; Pagès, Xavier; Van der Jeugd, Kees (2004) -
Ni-based silicides for 45 nm CMOS and beyond
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; de Potter de ten Broeck, Muriel; Lindsay, Richard; Raymakers, Toon; Pagès, Xavier; Mebarki, Bencherki; Mandrekar, Tushar; Maex, Karen (2004)