Ni-based silicides for 45 nm CMOS and beyond

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Authors
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; de Potter de ten Broeck, Muriel; Lindsay, Richard; Raymakers, Toon; Pagès, Xavier; Mebarki, Bencherki; Mandrekar, Tushar; Maex, Karen
Journal
Materials Science and Engineering B
Volume
114-115
Title
Ni-based silicides for 45 nm CMOS and beyond
Publication type
Journal article
Embargo date
9999-12-31
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