Ni-based silicides for 45 nm CMOS and beyond

Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; de Potter de ten Broeck, Muriel; Lindsay, Richard; Raymakers, Toon; Pagès, Xavier; Mebarki, Bencherki; Mandrekar, Tushar; Maex, Karen

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Ni-based silicides for 45 nm CMOS and beyond

Date

2004

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de Potter de ten Broeck, Muriel

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Materials Science and Engineering B

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Ni-based silicides for 45 nm CMOS and beyond

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