Publication:

Ni-based silicides for 45 nm CMOS and beyond

Date

2004
Journal article
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9236.pdf 615.56 KB

Author(s)

Lauwers, Anne  
;
Kittl, Jorge
;
Van Dal, Mark  
;
Chamirian, Oxana
;
Kmieciak, Malgorzata
;
de Potter de ten Broeck, Muriel  
;
Lindsay, Richard
;
Raymakers, Toon
;
Pagès, Xavier
;
Mebarki, Bencherki
;
Mandrekar, Tushar
;
Maex, Karen  

Journal

Materials Science and Engineering B

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