Ni-based silicides for 45 nm CMOS and beyond

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Author(s)

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Chamirian, Oxana

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Kmieciak, Malgorzata

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de Potter de ten Broeck, Muriel

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Lindsay, Richard

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Raymakers, Toon

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Mebarki, Bencherki

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Mandrekar, Tushar

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Journal

Materials Science and Engineering B

Metrics

1 since deposited on 2021-10-15

Acq. date: 2025-10-23

2015 since deposited on 2021-10-15

Acq. date: 2025-10-23