Browsing Articles by imec author "117c793356124c52114d9a9eb060821d4760da0e"
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Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007)