Browsing Articles by imec author "2ab494919cbd6f35c63c2a8df6a8d52e50c5ce9f"
Now showing items 1-5 of 5
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Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling
Wei, Chih-, I; Kang, Seulki; Das, Sayantan; Oya, Masahiro; Okamoto, Yosuke; Maruyama, Kotaro; Fenger, Germain; Latypov, Azat; Kusnadi, Ir; Khaira, Gurdaman; Yamazaki, Yuichiro; Gillijns, Werner; Halder, Sandip; Lorusso, Gian (2023) -
Asymmetric optical second-harmonic generation from chiral G-shaped gold nanostructures
Valev, Ventsislav; Silhanek, Alejandro; Verellen, Niels; Gillijns, Werner; Van Dorpe, Pol; Aktsipetrov, O.A.; Vandenbosch, Guy; Moshchalkov, Victor; Verbiest, Thierry (2010) -
Exploration of alternative mask for 0.33NA extreme ultraviolet single patterning at pitch 28-nm metal design
Xu, Dongbo; Gillijns, Werner; Tan, Ling Ee; Philipsen, Vicky; Kim, Ryan Ryoung han (2022) -
Extend 0.33 NA extreme ultraviolet single patterning to pitch 28-nm metal design by low-n mask
Xu, Dongbo; Gillijns, Werner; Tan, Ling Ee; Rio, David; Delorme, Max; Philipsen, Vicky; Kim, Ryan Ryoung han (2022-11-25) -
Modeling the topography of uneven substrates post spin-coating
Decoster, Stefan; Xiaoyu, Piao; Gillijns, Werner; Lazzarino, Frederic (2018)