Browsing Articles by imec author "2c3873d600ffe6994b1ba17dcc2120c2c2f3b401"
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Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Corrosion of narrow copper damascene interconnects
Ernur, Didem; Terzieva, Valentina; Wu, Wen; Brongersma, Sywert; Maex, Karen (2004) -
Grain growth in copper interconnect lines
Wu, Wen; Ernur, Didem; Brongersma, Sywert; Van Hove, Marleen; Maex, Karen (2004) -
Influence of low-k dry etch chemistries on the properties of Copper and a TA-based diffusion barrier
Ernur, Didem; Iacopi, Francesca; Carbonell, Laure; Struyf, Herbert; Maex, Karen (2003) -
Investigation of barrier and slurry effects on the galvanic corrosion of copper
Ernur, Didem; Kondo, S.; Shamiryan, Denis; Maex, Karen (2002) -
Narrow trench corrosion of copper damascene interconnects
Ernur, Didem; Kondo, S.; Maex, Karen (2002)