Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization

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Authors

Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen

Issue

12

Journal

Journal of the Electrochemical Society

Volume

152

Title

Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization

Publication type

Journal article

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