Publication:
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Date
| dc.contributor.author | Ernur, Didem | |
| dc.contributor.author | Terzieva, Valentina | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Sutcliffe, Victor | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Ernur, Didem | |
| dc.contributor.imecauthor | Terzieva, Valentina | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T01:31:15Z | |
| dc.date.available | 2021-10-16T01:31:15Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10435 | |
| dc.source.beginpage | B512 | |
| dc.source.endpage | B518 | |
| dc.source.issue | 12 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 152 | |
| dc.title | Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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