Browsing Articles by author "O'Connor, R."
Now showing items 1-3 of 3
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Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performance
O'Connor, R.; Hughes, G.; Degraeve, Robin; Kaczer, Ben (2005) -
The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
O'Connor, R.; Selvaraju, V.; Hughes, G.; Bogan, J.; Brady-Boyd, Anita; Armini, Silvia; Pasquali, Mattia (2022) -
Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides
O'Connor, R.; Degraeve, Robin; Kaczer, Ben; Veloso, Anabela; Hughes, G. (2004)