Browsing Articles by imec author "818ca57f7ef20c7bfab57ab6477958df0ee7534e"
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Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers
Poonkottil, Nithin; Rijckaert, Hannes; Rajendran, Khannan; Petit, Robin R.; Martin, Lisa I. D. J.; Van Thourhout, Dries; Van Driessche, Isabel; Detavernier, Christophe; Dendooven, Jolien (2023)