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Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers
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Authors
Poonkottil, Nithin
;
Rijckaert, Hannes
;
Rajendran, Khannan
;
Petit, Robin R.
;
Martin, Lisa I. D. J.
;
Van Thourhout, Dries
;
Van Driessche, Isabel
;
Detavernier, Christophe
;
Dendooven, Jolien
DOI
10.1002/admi.202201934
ISSN
2196-7350
Issue
9
Journal
ADVANCED MATERIALS INTERFACES
Volume
10
Title
Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers
Publication type
Journal article
Embargo date
2023-03-24
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3
20.500.12860/41299.3
*
2023-07-24T14:59:13Z
validation by library/open access desk
1
20.500.12860/41299
2023-03-17T03:38:46Z
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