Publication:
Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers
Loading...
Journal
Abstract
Description
Metrics
Downloads
223 since deposited on 2023-03-17
10last month
3last week
Acq. date: 2026-01-09
Views
1172 since deposited on 2023-03-17
1last month
Acq. date: 2026-01-09
Citations
Metrics
Downloads
223 since deposited on 2023-03-17
10last month
3last week
Acq. date: 2026-01-09
Views
1172 since deposited on 2023-03-17
1last month
Acq. date: 2026-01-09
Citations