Publication:
Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers
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Acq. date: 2026-08-07
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315 since deposited on 2023-03-17
39last month
13last week
Acq. date: 2026-08-07
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1176 since deposited on 2023-03-17
2last month
2last week
Acq. date: 2026-08-07
Citations