Publication:

Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers

Date

2023
Journal article
https://doi.org/10.1002/admi.202201934
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Published version 2.16 MB

Author(s)

Poonkottil, Nithin
;
Rijckaert, Hannes
;
Rajendran, Khannan  
;
Petit, Robin R.
;
Martin, Lisa I. D. J.
;
Van Thourhout, Dries  
;
Van Driessche, Isabel
;
Detavernier, Christophe
;
Dendooven, Jolien

Journal

ADVANCED MATERIALS INTERFACES

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231 since deposited on 2023-03-17
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1173 since deposited on 2023-03-17
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Acq. date: 2026-01-25

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