dc.contributor.author | Poonkottil, Nithin | |
dc.contributor.author | Rijckaert, Hannes | |
dc.contributor.author | Rajendran, Khannan | |
dc.contributor.author | Petit, Robin R. | |
dc.contributor.author | Martin, Lisa I. D. J. | |
dc.contributor.author | Van Thourhout, Dries | |
dc.contributor.author | Van Driessche, Isabel | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Dendooven, Jolien | |
dc.date.accessioned | 2023-07-24T15:01:05Z | |
dc.date.available | 2023-03-17T03:38:46Z | |
dc.date.available | 2023-07-24T15:01:05Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2196-7350 | |
dc.identifier.other | WOS:000936702100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41299.3 | |
dc.source | WOS | |
dc.title | Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers | |
dc.type | Journal article | |
dc.contributor.imecauthor | Rajendran, Khannan | |
dc.contributor.imecauthor | Van Thourhout, Dries | |
dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
dc.date.embargo | 2023-03-24 | |
dc.identifier.doi | 10.1002/admi.202201934 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 2201934 | |
dc.source.endpage | na | |
dc.source.journal | ADVANCED MATERIALS INTERFACES | |
dc.source.issue | 9 | |
dc.source.volume | 10 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement no. 765378. H.R. acknowledges support and funding as postdoctoral fellow fundamental research of the Research Foundation - Flanders (FWO) under grant number 1273621N. | |