Browsing Articles by imec author "b2acc327ed0b6e11b87d04b7097c1c7536df1d4b"
Now showing items 1-2 of 2
-
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
Wilson, Chris; Croes, Kristof; Van Cauwenberghe, Marc; Tokei, Zsolt; Beyer, Gerald; Horsfall, Alton; O'Neill, Anthony (2009) -
Using a biased-ICP reactor for PR strip and Cu barrier removal
Van Cauwenberghe, Marc; Mannaert, Geert; Boullart, Werner; Hendrickx, Dirk; Schmidt, M.O. (2004)