A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects

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Authors
Wilson, Chris; Croes, Kristof; Van Cauwenberghe, Marc; Tokei, Zsolt; Beyer, Gerald; Horsfall, Alton; O'Neill, Anthony
Issue
11
Journal
Semicond. Sci. Technol.
Volume
24
Title
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
Publication type
Journal article
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