Publication:
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
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1905 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-25
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Statistics
Views
1905 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-25
Citations