Publication:
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
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1903 since deposited on 2021-10-18
5last month
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Acq. date: 2026-04-28
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Statistics
Views
1903 since deposited on 2021-10-18
5last month
2last week
Acq. date: 2026-04-28
Citations