Publication:
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
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1897 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-13
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Metrics
Views
1897 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-13
Citations