Browsing Articles by author "Ignat, M."
Now showing items 1-2 of 2
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Analysis of local mechanical stresses in and near tungsten lines on silicon substrates
De Wolf, Ingrid; Ignat, M.; Pozza, G.; Maniguet, L.; Maes, Herman (1999) -
Experimental validation of mechanical stress models by micro-Raman spectroscopy
De Wolf, Ingrid; Pozzat, G.; Pinardi, Kuntjoro; Howard, Dave; Ignat, M.; Jain, Suresh; Maes, Herman (1996)