Analysis of local mechanical stresses in and near tungsten lines on silicon substrates

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Authors

De Wolf, Ingrid; Ignat, M.; Pozza, G.; Maniguet, L.; Maes, Herman

Issue

9

Journal

J. Appl. Phys.

Volume

85

Title

Analysis of local mechanical stresses in and near tungsten lines on silicon substrates

Publication type

Journal article

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