Publication:
Analysis of local mechanical stresses in and near tungsten lines on silicon substrates
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Ignat, M. | |
| dc.contributor.author | Pozza, G. | |
| dc.contributor.author | Maniguet, L. | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-06T10:59:50Z | |
| dc.date.available | 2021-10-06T10:59:50Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3389 | |
| dc.source.beginpage | 6477 | |
| dc.source.endpage | 6485 | |
| dc.source.issue | 9 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 85 | |
| dc.title | Analysis of local mechanical stresses in and near tungsten lines on silicon substrates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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