Browsing Articles by imec author "c00ef0cd3ac41498c91d57bee6a7b210ea6c0e44"
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Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert; Xu, XiuMei (2012) -
Leaching and drying marks on photoresist-coated substrates
Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert (2014) -
Role of ambient composition on the formation and shape of watermarks on a bare silicon substrate
Tamaddon, Amir-Hossein; Mertens, Paul; Vermant, Jan; Vereecke, Guy; Holsteyns, Frank; Heyns, Marc; De Gendt, Stefan (2014)