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Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
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Authors
Belmiloud, Naser
;
Tamaddon, Amir-Hossein
;
Mertens, Paul
;
Struyf, Herbert
;
Xu, XiuMei
ISSN
2162-8769
Issue
1
Journal
ECS Journal of Solid State Science and Technology
Volume
1
Title
Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
Publication type
Journal article
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