Publication:
Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
Date
| dc.contributor.author | Belmiloud, Naser | |
| dc.contributor.author | Tamaddon, Amir-Hossein | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | Xu, XiuMei | |
| dc.contributor.imecauthor | Tamaddon, Amir-Hossein | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.imecauthor | Xu, XiuMei | |
| dc.contributor.orcidimec | Tamaddon, Amir-Hossein::0000-0003-4566-0697 | |
| dc.contributor.orcidimec | Xu, XiuMei::0000-0002-3356-8693 | |
| dc.date.accessioned | 2021-10-20T10:05:07Z | |
| dc.date.available | 2021-10-20T10:05:07Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 2162-8769 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20349 | |
| dc.source.beginpage | P34 | |
| dc.source.endpage | P39 | |
| dc.source.issue | 1 | |
| dc.source.journal | ECS Journal of Solid State Science and Technology | |
| dc.source.volume | 1 | |
| dc.title | Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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