Browsing Articles by author "Yamaguchi, Atsuko"
Now showing items 1-1 of 1
-
Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Tan, Chi Lim; Van den Bosch, Geert; Furnemont, Arnaud (2018)