Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

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Authors

Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Tan, Chi Lim; Van den Bosch, Geert; Furnemont, Arnaud

ISSN

1932-5150

Issue

2

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

17

Title

Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

Publication type

Journal article

Embargo date

9999-12-31

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