Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

Publication:

2018

Journal article

Author(s)

;

;

;

;

;

;

;

Journal of Micro/Nanolithography MEMS and MOEMS

1961 since deposited on 2021-10-26

7last month

Acq. date: 2026-09-19