Browsing Articles by imec author "ede7c31ba0aa0ceffd4f7dec4c9d611fb9c85cfe"

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    • Highly scaled ruthenium interconnects 

      Dutta, Shibesh; Kundu, Shreya; Gupta, Anshul; Jamieson, Geraldine; Gomez Granados, Juan Fernando; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2017)