Highly scaled ruthenium interconnects

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Authors

Dutta, Shibesh; Kundu, Shreya; Gupta, Anshul; Jamieson, Geraldine; Gomez Granados, Juan Fernando; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph

ISSN

0741-3106

Issue

7

Journal

IEEE Electron Device Letters

Volume

38

Title

Highly scaled ruthenium interconnects

Publication type

Journal article

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