Publication:

Highly scaled ruthenium interconnects

Date

2017
Journal article
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dc.contributor.authorDutta, Shibesh
dc.contributor.authorKundu, Shreya
dc.contributor.authorGupta, Anshul
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorGomez Granados, Juan Fernando
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorGomez Granados, Juan Fernando
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2021-10-24T04:30:57Z
dc.date.available2021-10-24T04:30:57Z
dc.date.issued2017
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28291
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7934397/
dc.source.beginpage949
dc.source.endpage951
dc.source.issue7
dc.source.journalIEEE Electron Device Letters
dc.source.volume38
dc.title

Highly scaled ruthenium interconnects

dc.typeJournal article
dspace.entity.typePublication
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