Publication:

Highly scaled ruthenium interconnects

Date

2017

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

;

Jamieson, Geraldine

;

Gomez Granados, Juan Fernando

;

Boemmels, Juergen

;

;

;

Adelmann, Christoph

Journal

IEEE Electron Device Letters

Metrics

2012 since deposited on 2021-10-24

1last month

Acq. date: 2026-01-06