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Articles
Highly scaled ruthenium interconnects
Publication:
Highly scaled ruthenium interconnects
Date
2017
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dutta, Shibesh
;
Kundu, Shreya
;
Gupta, Anshul
;
Jamieson, Geraldine
;
Gomez Granados, Juan Fernando
;
Boemmels, Juergen
;
Wilson, Chris
;
Tokei, Zsolt
;
Adelmann, Christoph
Journal
IEEE Electron Device Letters
Abstract
Description
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Views
2007
since deposited on 2021-10-24
447
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
2007
since deposited on 2021-10-24
447
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations