Publication:

Highly scaled ruthenium interconnects

Date

2017

Journal article

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Author(s)

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Jamieson, Geraldine

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Gomez Granados, Juan Fernando

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Boemmels, Juergen

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Adelmann, Christoph

Journal

IEEE Electron Device Letters

Statistics

2012 since deposited on 2021-10-24

Acq. date: 2026-02-24