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Depth profiling of strain using micro-Raman measurements

dc.contributor.authorAtkinson, A.
dc.contributor.authorJain, Suresh
dc.contributor.authorMaes, Herman
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorWillander, M.
dc.date.accessioned2021-10-14T16:36:15Z
dc.date.available2021-10-14T16:36:15Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5017
dc.sourceIIOimport
dc.titleDepth profiling of strain using micro-Raman measurements
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage584
dc.source.endpage588
dc.source.journalSemiconductor Science and Technology
dc.source.issue7
dc.source.volume16
imec.availabilityPublished - imec


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