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L-shape spacer architecture for low cost, high performance CMOS

dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorPerello, Carles
dc.contributor.authorVandamme, Ewout
dc.contributor.authorPochet, Sandrine
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBeckx, Stephan
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLauwers, A.
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T16:36:18Z
dc.date.available2021-10-14T16:36:18Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5020
dc.sourceIIOimport
dc.titleL-shape spacer architecture for low cost, high performance CMOS
dc.typeProceedings paper
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.source.peerreviewno
dc.source.beginpage297
dc.source.endpage304
dc.source.conferenceULSI Process Integration II; 26 March 2001; Washington, D.C., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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