Precipitation of oxygen in silicon
| dc.contributor.editor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-14T16:37:05Z | |
| dc.date.available | 2021-10-14T16:37:05Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5052 | |
| dc.source | IIOimport | |
| dc.title | Precipitation of oxygen in silicon | |
| dc.type | Book chapter | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 6630 | |
| dc.source.book | Encyclopedia of Materials: Science and Technology | |
| dc.source.endpage | 6636 | |
| imec.availability | Published - imec |
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