Making the cleaner greener
| dc.contributor.author | Bergman, E. | |
| dc.contributor.author | Lagrange, Sébastien | |
| dc.contributor.author | Claes, M. | |
| dc.date.accessioned | 2021-10-14T16:37:12Z | |
| dc.date.available | 2021-10-14T16:37:12Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5055 | |
| dc.source | IIOimport | |
| dc.title | Making the cleaner greener | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 81 | |
| dc.source.endpage | 84 | |
| dc.source.journal | European Semiconductor | |
| dc.source.issue | March | |
| imec.availability | Published - imec |
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