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Correlation between predicted cause of SRAM failures and in-line defect data

dc.contributor.authorCoppens, P.
dc.contributor.authorVanhorebeek, Guido
dc.contributor.authorDe Backer, E.
dc.date.accessioned2021-10-14T16:43:47Z
dc.date.available2021-10-14T16:43:47Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5169
dc.sourceIIOimport
dc.titleCorrelation between predicted cause of SRAM failures and in-line defect data
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage53
dc.source.endpage57
dc.source.journalMicroelectronics Reliability
dc.source.issue1
dc.source.volume41
imec.availabilityPublished - imec


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