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Statistical analysis of shallow P-N junction leakage increase using XTEM results probabilities

dc.contributor.authorCzerwinski, A.
dc.contributor.authorKatcki, J.
dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorRatajczak, J.
dc.contributor.authorGaubas, Eugenijus
dc.date.accessioned2021-10-14T16:44:13Z
dc.date.available2021-10-14T16:44:13Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5174
dc.sourceIIOimport
dc.titleStatistical analysis of shallow P-N junction leakage increase using XTEM results probabilities
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage105
dc.source.endpage107
dc.source.journalMaterials Science in Semiconductor Processing
dc.source.issue1_3
dc.source.volume4
imec.availabilityPublished - imec


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