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Simulations and measurements of capacitance in dielectric stacks and consequences for integration

dc.contributor.authorDe Roest, David
dc.contributor.authorDonaton, R. A.
dc.contributor.authorStucchi, Michele
dc.contributor.authorMaex, Karen
dc.contributor.authorNauwelaers, Bart
dc.date.accessioned2021-10-14T16:46:39Z
dc.date.available2021-10-14T16:46:39Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5202
dc.sourceIIOimport
dc.titleSimulations and measurements of capacitance in dielectric stacks and consequences for integration
dc.typeJournal article
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorNauwelaers, Bart
dc.source.peerreviewno
dc.source.beginpage29
dc.source.endpage35
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume55
imec.availabilityPublished - imec


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